发明名称 |
GAS DISTRIBUTION PLATE WITH DISCRETE PROTECTIVE ELEMENTS |
摘要 |
Embodiments of the present invention provide a gas distribution plate assembly having protective elements for plasma processing. The gas distribution plate assembly includes a base plate having a front side and a backside, and a plurality of protective elements in direct contact with the base plate. The protective elements cover the front side of the base plate to protect the base plate from a plasma processing environment during use. |
申请公布号 |
US2012193456(A1) |
申请公布日期 |
2012.08.02 |
申请号 |
US201213363342 |
申请日期 |
2012.01.31 |
申请人 |
LUBOMIRSKY DMITRY;RAMASWAMY KARTIK;BERA KALLOL;SUN JENNIFER;APPLIED MATERIALS, INC. |
发明人 |
LUBOMIRSKY DMITRY;RAMASWAMY KARTIK;BERA KALLOL;SUN JENNIFER |
分类号 |
B05B1/14 |
主分类号 |
B05B1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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