| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card in which variation of height position of a tip end of a probe is suppressed in an early stage when the probe card is influenced by thermal expansion or thermal contraction of the card holder during high temperature test or low temperature test. <P>SOLUTION: The probe card includes a main substrate 100 having a first face and a second face being rear side of the first face; a reinforcing plate 200 fixed to the first face of the main substrate 100, an annular reinforcing member 300 having a thermal expansion coefficient smaller than that of the reinforcing plate 200; a probe unit 400 held inside the reinforcing member 300; and fixing means 500 for fixing the reinforcing member 300 to the reinforcing plate 200 at the second face side of the main substrate 100. <P>COPYRIGHT: (C)2012,JPO&INPIT |
