| 摘要 |
<P>PROBLEM TO BE SOLVED: To make mounting of a contact combustion type gas sensor element easier without impairing gas sensitivity and by housing a detection element and a compensation element in one chip. <P>SOLUTION: A detection element and a compensation element, which are made up of a sintered body and a heater section, are provided on both surfaces of a front surface and a rear surface of an insulator film on a silicon substrate. Further, a plurality of through holes is provided around the heater section. A part of the heater section formed on the rear surface side penetrates the insulator film and extends to an electrode section on the front surface side. The heater sections on the front surface and the rear surface are severally formed in the same shape using the same resistive material. A finally formed gas sensor can block heat generated in the detection element and the compensation element, by which gas sensitivity is improved, and response speed is improved due to flowability improvement of gas by through holes. Further, electrodes which obtain electric conduction with each element are collected on the front surface, by which mounting becomes easier. <P>COPYRIGHT: (C)2012,JPO&INPIT |
