| 发明名称 |
CUSTOMIZED RF MEMS CAPACITOR ARRAY USING REDISTRIBUTION LAYER |
| 摘要 |
Disclosed is a method for fabricating a customized micro-electromechanical systems (MEMS) integrated circuit using at least one redistribution layer. The method includes steps of providing a substrate on which MEMS components are fabricated and coupling predetermined ones of the MEMS components via the redistribution traces.
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| 申请公布号 |
US2012193781(A1) |
申请公布日期 |
2012.08.02 |
| 申请号 |
US201113311687 |
申请日期 |
2011.12.06 |
| 申请人 |
COSTA JULIO;HAMMOND JONATHAN HALE;MORRIS THOMAS SCOTT;RF MICRO DEVICES, INC. |
发明人 |
COSTA JULIO;HAMMOND JONATHAN HALE;MORRIS THOMAS SCOTT |
| 分类号 |
H01L23/48;H01L21/768;H01L23/498 |
主分类号 |
H01L23/48 |
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