发明名称 IMPLEMENTING MULTIPLE DIFFERENT TYPES OF DIES FOR MEMORY STACKING
摘要 A method and structure are provided for implementing multiple different types of dies for memory stacking. A common wafer is provided with a predefined reticle type. The reticle type includes a plurality of arrays, and a plurality of periphery segments. A plurality of through-silicon-vias (TSVs) is placed at boundaries between array and periphery segments. Multiple different types of dies for memory stacking are obtained based upon selected scribing of the dies from the common wafer.
申请公布号 US2012196402(A1) 申请公布日期 2012.08.02
申请号 US201213364346 申请日期 2012.02.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COTEUS PAUL W.;KIM KYU-HYOUN
分类号 H01L21/50 主分类号 H01L21/50
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