Scanning probe microscope combined with a device for modification of the object surface

摘要

The invention relates to a scanning probe microscope combined with a device for modification of a surface of a sample (40) comprising:
- a base (1), on which there are mounted:
o a punch (2) provided with a first drive (4) and adapted at least for the modification of the surface of the sample (40) and
o a mechanism (6) for the movement of the sample (40) provided with a second drive (7),
- a scanning device (33) mounted on the mechanism (6) for the movement of the sample (40),
- the sample (40) fixed on the scanning device (33),
- a first clamp (27) provided with a probe (28) adapted for probing the sample (6) and
- a control unit adapted for controlling of at least the scanning device (33) and the probe (28). According to the invention, it comprises a platform (18) with a first and a second guides on which a moveable carriage (26) is mounted. The platform (18) is fixed on the mechanism (6) for the movement of the sample (40). The first clamp (27) with the probe (28) are mounted on the moveable carriage (26).