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经营范围
发明名称
Positive photoresist composition
摘要
申请公布号
EP1798596(B1)
申请公布日期
2012.08.01
申请号
EP20060256335
申请日期
2006.12.13
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
YAMAGUCHI, HIROMASA;KATO, HIDETO
分类号
G03F7/004;G03F7/022;G03F7/075
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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