发明名称 INFRARED INSPECTION OF BONDED SUBSTRATES
摘要 A method and apparatus for obtaining inspection information is described. A standard CCD or CMOS camera is used to obtain images in the near infrared region. Background and noise components of the obtained image are removed and the signal to noise ratio is increased to provide information that is suitable for use in inspection.
申请公布号 KR20120085916(A) 申请公布日期 2012.08.01
申请号 KR20127015809 申请日期 2010.11.16
申请人 RUDOLPH TECHNOLOGIES, INC. 发明人 ZHOU WEI
分类号 G01N21/88;G01N21/35 主分类号 G01N21/88
代理机构 代理人
主权项
地址