| 摘要 |
PURPOSE: A plasma vacuum coating apparatus is provided to continuously maintain evacuation efficiency of a vacuum chamber by preventing contamination of the refrigerating trap of the vacuum chamber due to the deposition of a target material. CONSTITUTION: A plasma vacuum coating apparatus comprises a cryogenic refrigeration trap protection device, a target pollution prevention device, an evacuation improving device, and a door locking device. In the cryogenic refrigeration trap protection device, elongated holes of a movable shutter and a fixed shutter are arranged crossing each other in order to prevent the deposition of a target material on the surface of a cryogenic refrigeration shutter. The target pollution prevention device blocks a target(T) with a shield in order to prevent the surface of the target from being polluted by deposition on a protective film material. The evacuation improving device immediately dries the air, flowing into a vacuum chamber(A) when opening a door(A1) for coating a material using a heater. The door locking device advances the operating rod of a locking cylinder so that the bottom of a locking plate is latched to the rim of the door and the door is completely closed.
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