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经营范围
发明名称
METHOD OF FORMING FINE PATTERN
摘要
申请公布号
KR101170532(B1)
申请公布日期
2012.08.01
申请号
KR20090121777
申请日期
2009.12.09
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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