发明名称 |
ACTUATABLE CAPACITIVE TRANSDUCER FOR QUANTITATIVE NANOINDENTATION COMBINED WITH TRANSMISSION ELECTRON MICROSCOPY |
摘要 |
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit. - |
申请公布号 |
EP1982408(A4) |
申请公布日期 |
2012.08.01 |
申请号 |
EP20070794320 |
申请日期 |
2007.02.08 |
申请人 |
HYSITRON, INC. |
发明人 |
WARREN, ODEN L.;ASIF, S.A. SYED;CYRANKOWSKI, EDWARD;KOUNEV, KALIN |
分类号 |
H02N1/08 |
主分类号 |
H02N1/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|