发明名称 SEMICONDUCTOR DEVICE, SEMICONDUCTOR LAYER AND PRODUCTION METHOD THEREOF
摘要 <p>A semiconductor device is prepared by the use of a vapor phase method and is provided with a semiconductor layer composed of boron phosphide (BP) having a band gap at room temperature of not less than 2.8 eV and not more than 3.4 eV or a boron phosphide (BP)-base mixed crystal which contains the boron phosphide (BP) and which is represented by the formula: B<SUB>alpha</SUB>Al<SUB>beta</SUB>Ga<SUB>gamma</SUB>In<SUB>1-alpha-beta-gamma</SUB>P<SUB>delta</SUB>As<SUB>epsilon</SUB>N<SUB>1-delta-epsilon</SUB> (0<alpha<=1, 0<=beta<1, 0<=gamma<1, 0<alpha+beta+gamma<=1, 0<delta<=1, 0<=epsilon<1, 0<delta+epsilon<=1).</p>
申请公布号 EP1393352(B1) 申请公布日期 2012.08.01
申请号 EP20020730700 申请日期 2002.05.23
申请人 SHOWA DENKO K.K. 发明人 UDAGAWA, TAKASHI
分类号 H01L21/02;C30B25/02;C30B29/40;H01L21/18;H01L21/20;H01L21/205;H01L21/335;H01L27/15;H01L29/20;H01L29/201;H01L29/205;H01L29/778;H01L31/0304;H01L31/18;H01L33/12;H01L33/30 主分类号 H01L21/02
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