| 发明名称 |
THIN-FILM BATTERY METHODS FOR COMPLEXITY REDUCTION |
| 摘要 |
Thin-film battery methods for complexity reduction are described. Processing equipment arrangements suitable to support thin-film battery methods for complexity reduction are also described. Cluster tools to support thin-film battery methods for complexity reduction are also described. |
| 申请公布号 |
EP2481120(A2) |
申请公布日期 |
2012.08.01 |
| 申请号 |
EP20100819303 |
申请日期 |
2010.09.20 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KWAK, BYUNG-SUNG;KRISHNA, NETY, M. |
| 分类号 |
H01M10/04;H01M4/04;H01M4/13;H01M4/139;H01M6/40;H01M10/0525;H01M10/0562 |
主分类号 |
H01M10/04 |
| 代理机构 |
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