发明名称 METHOD AND APPARATUS TO DETECT THE ALIGNMENT OF A SUBSTRATE
摘要 <p>A method of detecting the alignment of a substrate during a sequence of printing steps, comprises detecting in a detection unit a position of at least one printing track that forms a printed pattern onto a surface of the substrate in a first printing station, determining a reference point in at least a portion of the printing track, comparing the actual position of the reference point with an expected or previously detected position of the reference point, determining an offset between the actual position and the expected or previously detected position of the reference point, adjusting the reciprocal position between the printing head of a second printing station and the substrate to account for the determined offset, and then printing a second pattern over the first pattern.</p>
申请公布号 KR20120085765(A) 申请公布日期 2012.08.01
申请号 KR20127008661 申请日期 2010.09.02
申请人 APPLIED MATERIALS, INC. 发明人 DE SANTI LUIGI;BACCINI ANDREA;CELLERE GIORGIO;GALIAZZO MARCO;PASQUALIN GIANFRANCO;VERCESI TOMMASO
分类号 H01L31/0224;H05K3/12 主分类号 H01L31/0224
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