SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD,申请号KR20090109007-传众专利搜索

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发明名称	SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
摘要
申请公布号	KR101170356(B1)	申请公布日期	2012.08.01
申请号	KR20090109007	申请日期	2009.11.12
申请人		发明人
分类号	H01L21/677;H01L21/02;H01L21/3065;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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