发明名称 Self-aligned silicon carrier for optical device supporting wafer scale methods
摘要 Disclosed is a carrier assembly for and a method of manufacturing an optical device. The method comprises providing a silicon substrate; attaching a number of optical dies on the silicon substrate to form an optical device carrier assembly; providing a corresponding number of through holes in the silicon substrate to permit the passage of light therethrough and further providing guide holes in the silicon substrate to present means for passive alignment of an external optical connection; and dicing the optical device carrier assembly to form individual optical devices. Preferably, the step of attaching a number of optical dies comprises using self-alignment of solder bumps using gaseous flux, the through holes are dry etched into the silicon substrate, and/or the volume between the optical die and silicon substrate is filled with a transparent polymer. Preferably, the transparent polymer is silicone rubber or epoxy. Preferably, the optical dies have a polymer mass to assist the heat transfer to the silicon substrate.
申请公布号 US8232142(B2) 申请公布日期 2012.07.31
申请号 US20090558824 申请日期 2009.09.14
申请人 STEIJER ODD ROBERT;ANDERSSON HANS MAGNUS EMIL;TYCO ELECTRONICS SERVICES GMBH 发明人 STEIJER ODD ROBERT;ANDERSSON HANS MAGNUS EMIL
分类号 H01L21/44;H01L21/00 主分类号 H01L21/44
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