Particle removing member of substrate processing equipment

摘要

The present invention is a particle removing member of a substrate processing equipment including a particle removing layer in which a time necessary for a signal intensity of free induction decay measured by a pulse NMR-Solid Echo method to decay to 37% of an initial value at a measurement temperature of 100 degrees centigrade is 1000 μs or less, in particular, a particle removing sheet including the above-constituted particle removing layer on a support, and a conveying member with particle removing function formed by adhering the above-constituted particle removing sheet on the conveying member, and furthermore a method of removing particle of a substrate processing equipment, including conveying the above-constituted conveying member with particle removing function into a substrate processing equipment.