| 摘要 |
This invention relates to a method of optical correction of field position distortions created by galvano motor scanning heads. In addition, the invention relates to the apparatus and method to achieve a calibration of said field positions to overcome said distortions generated by the delivery optics within a galvano motor scanning head using a pre-calibrated target that may be positioned into a registration or ‘lay’ system for ease of identifying and measuring said series of marks by removal and replacing said pre-calibrated target into said registration or ‘lay’ system, pre-determined logic means to generate a series of marks on said pre-calibrated target using said galvano motor scanning head and said galvano motor scanning head control apparatus and operator input so that said logic means may calculate from a minimum number of operator entries corresponding to said series of marks on said pre-calibrated target that may be positioned into said registration or ‘lay’ system for ease of identifying and measuring said series of marks by removal and replacing said pre-calibrated target into said registration or ‘lay’ system a full field correction of the field position distortions taking into account all beam or laser beam, mounting, alignment and parallelity intolerances to generate corrected galvano motor position control optical correction data reactive to the exact parameters of an individual laser, delivery optic/s, galvano motor scanning head and target plane set-up. |
