发明名称 |
Magnetic field generating apparatus and plasma processing apparatus |
摘要 |
A magnetic field generating apparatus which generates a cusped magnetic field on an electrode includes a magnet mechanism which is attached to the electrode and includes a plurality of magnets held on a holding plate, and a rotation mechanism which rotates the holding plate. The plurality of magnets (61) are regularly arrayed to be point-symmetrical about a specific point. The specific point is at a position shifted from the center of rotation of the holding plate by the rotation mechanism. |
申请公布号 |
US8231767(B2) |
申请公布日期 |
2012.07.31 |
申请号 |
US20100974811 |
申请日期 |
2010.12.21 |
申请人 |
IORI KAZUYUKI;IKEDA MASAYOSHI;SAGO YASUMI;CANON ANELVA CORPORATION |
发明人 |
IORI KAZUYUKI;IKEDA MASAYOSHI;SAGO YASUMI |
分类号 |
C25B9/00;C23C14/00;C25B11/00;C25B13/00 |
主分类号 |
C25B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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