| 摘要 |
The subject invention is a method for dynamically controlling the density neutral atoms with an active element in a plasma vacuum chamber (4) and a device for treatment of solid materials by using the present method. Control system through measurement and record ingdensity of neutral atoms of oxygen, nitrogen or hydrogen admission input data (17 and 18), under which generates control signals for adjusting and controlling the position of the active element (20), with a high coefficient of a heterogeneous surface recombination of oxygen atoms, nitrogen or hydrogen, with the corresponding engine (21). The system includes the density of neutral oxygen atoms,nitrogen or hydrogen through various methods such as catalytic probe (22), optical emission spectroscopy (23 and 24), optical absorption spectroscopy and titration. This kind of control enables dynamic control of the density of neutral atoms in around the treated sample, which is independent of the workpiece other discharge parameters, and are actively changing the density neutral atoms in the presence or absence of a workpiece independently of the other discharge parameters. |
