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发明名称
CVD APPARATUS WITH ELECTRODE
摘要
申请公布号
KR20120085276(A)
申请公布日期
2012.07.31
申请号
KR20127011552
申请日期
2010.10.08
申请人
HEMLOCK SEMICONDUCTOR CORPORATION
发明人
HILLABRAND DAVID;MCCOY KEITH
分类号
C23C16/44;C01B33/035;H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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