SUBSTRATE COOLING APPARATUS FOR MANUFACTURING POLYCRYSTALINE SILICON WAFER FOR SOLAR CELL

摘要

PURPOSE: A substrate cooling apparatus for manufacturing a polycrystalline silicon wafer for a solar cell is provided to manufacture a solar cell board of high efficiency by designing a refrigerant flow groove on a cooling plate in various patterns. CONSTITUTION: A substrate cooling apparatus includes a cooling plate(17) and a refrigerant supply part(10). The cooling plate is attached to a backside of a substrate(19). The cooling plate cools the substrate and a plurality of refrigerant flow grooves. The refrigerant supply part supplies a refrigerant to the refrigerant flow groove of the cooling plate. The refrigerant supply part includes a cover plate(11) covering up the top of the cooling plate A refrigerant inlet and a refrigerant outlet are formed on both edge portions of the cover plate.