SELENIZATION PROCESS APPARATUS FOR GLOWING CIGS THIN FILM ON SOLAR CELL

摘要

PURPOSE: A selenide processing apparatus for CIGS(CuInGaSe2) thin film growth is provided to improve the accuracy of a CIGS thin film process by measuring actual consumption of selenium in rear time by using a detection sensor. CONSTITUTION: A storing unit(110) is formed at one bottom side of a housing(100). A reaction chamber(130) forms a CIGS layer by executing a selenide reaction by using an activated gas molecule entered from a cracker unit. A heater(160) is installed at one side among the storing unit, a cracker unit, and the reaction chamber. The heater supplies heat energy. An exhaust pipe(140) discharges gas activated within the reaction chamber to outside. A detection sensor(150) sensing the activated gas is installed inside the exhaust pipe.