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发明名称
PROFILING COMPLEX SURFACE STRUCTURES USING SCANNING INTERFEROMETRY
摘要
申请公布号
KR101169293(B1)
申请公布日期
2012.07.30
申请号
KR20057016623
申请日期
2004.03.08
申请人
发明人
分类号
G01B11/24;G01B9/02;G01B11/06
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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