发明名称 |
UV LAMP ASSEMBLY OF DEGAS CHAMBER HAVING ROTARY SHUTTERS |
摘要 |
<p>A UV lamp assembly having rotary shutters. Each rotary shutter has a concave wall with a reflective concave surface. The rotary shutters can be collectively rotated between an open position and an closed position. At the open position, the rotary shutters do not block UV light of UV lamps from leaving the UV lamp assembly while at the closed position the rotary shutters block UV light from leaving the UV lamp assembly.</p> |
申请公布号 |
SG181778(A1) |
申请公布日期 |
2012.07.30 |
申请号 |
SG20120044806 |
申请日期 |
2010.12.06 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
HART, WILLIAM, T.;EGLEY, FRED, DENNIS |
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