| 摘要 |
<p>71 SULFONIUM COMPOUND, PHOTO-ACID GENERATOR, AND METHOD FOR OF THE DISCLOSUREA sulfonium compound represented by formula (I), a photo-acid generator, and a method for producing a sulthnium compound are provided:[Chemical Formula 1] R4+ -Awherein X represents an electron-donatinggroup; R1 and R2 each represent an alkyl group, a cycloalkyl group, or the like; R3 and R4 each represent an arylene group or aheteroarylene group; R5 and R6 each represent an alkyl group, a cycloalkyl group, or the like; and AI and EY are anions that are different from each other. The sulMniumcompound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.</p> |
