| 摘要 |
The device has detection units (7) i.e. laser inferometers, detecting X-Y positions of alignment keys that are arranged along a contact surface. Other detection units (8) detect other X-Y positions of another alignment keys that correspond to the former keys and are arranged along another contact surface. The latter detection units are provided in an X-Y-level in a Cartesian X-Y-coordinate system that is independent of the movement of one of substrates (2). The surfaces are aligned in alignment positions that are determined based on the former and the latter X-Y positions, respectively. An independent claim is also included for a method for aligning the contact surface of the substrate with another contact surface of another substrate. |
