| 摘要 |
FIELD: physics. ^ SUBSTANCE: accelerometer has a proof mass, movable electrodes, fixed electrodes attached to a substrate by anchors, two voltage converters, a differencing unit and a control unit. There are three capacitor plates on each fixed electrode, wherein the first inputs of the voltage converters are connected to the first plate of the first electrode and the second plate of the second electrode, while the second plate of the first electrode and the first plate of the second electrode are connected to the second inputs of the voltage converters, respectively. Outputs of the voltage converters are connected to the first and second inputs of the differencing unit, whose output is connected through the control unit to the third and fourth plates of the movable electrode which, together with the third plates of the first and second fixed electrode, form the torque sensor. ^ EFFECT: use of additional plates on the movable and fixed electrodes increases accuracy of measuring acceleration in three-component vibration conditions. ^ 1 dwg |
