发明名称 Semiconductor device and method for forming the same
摘要 The semiconductor device comprises a metal line configured to be buried in an interlayer insulation layer formed over a semiconductor substrate, a first insulating pattern configured to be formed over the interlayer insulating layer and the first metal line so that the first metal line is exposed, a second insulating pattern configured to be buried between the first insulating patterns so that the first metal line is exposed, and a third insulating pattern configured to be formed over the first insulating pattern and the second insulating pattern so that the first metal line is exposed, thereby reducing the resistance of a contact plug, such that it operates at high speed and requires low power consumption.
申请公布号 KR101168507(B1) 申请公布日期 2012.07.27
申请号 KR20100069141 申请日期 2010.07.16
申请人 发明人
分类号 H01L21/3205;H01L21/28 主分类号 H01L21/3205
代理机构 代理人
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