| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly and highly accurately measure the flow rate of a flow controller for gas supply device, and to simplify and miniaturize the structure of the flow rate measuring device for use in a measurement. <P>SOLUTION: The flow rate measuring device includes: a branch line Lb for branchedly and dissociatively connecting an inlet-side end to an upstream part of a shutoff valve V<SB POS="POST">0</SB>provided at an outlet end of a gas supply line L, and connecting the outlet-side end to a gas outflow side; a shutoff valve V provided at the outlet side of the branch line Lb; a pressure detector Pd and a temperature detector Td for detecting a gas pressure and a gas temperature in the upstream side of the shutoff valve V; an arithmetic control device CP in which detecting signals from the pressure detector Pd and the temperature detector Td are input and which calculates the gas flow rate passing through the branch line Lb. The flow rate measuring device is branchedly and dissociatively connected to the upstream part of the shutoff valve V<SB POS="POST">0</SB>that is provided at the outlet end of the gas supply line L of the gas supply device GF. <P>COPYRIGHT: (C)2012,JPO&INPIT |
