| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce costs required for measurement and inspection. <P>SOLUTION: A jig 20 for measurement is rotated so that the jig 20 for measurement faces a substrate 100 to be inspected using the jig 20 for measurement in which a contact shoe line La (Lb) with a plurality of contact shoes Pa (Pb) connected each other and arranged along the direction of an arrow head Aa (Ab) is arranged along the direction of an arrow head Ab (Aa), in a positional relationship to satisfy the first and the second conditions that at least one (a contact shoe Pa2) of contact shoes Pa and Pb in one of the contact shoe lines La and Lb, and at least one (a contact shoe Pa4) of the contact shoes Pa and Pb in the other of the contact shoe lines La and the Lb contact, respectively, to both measurement points P1 and P2 for measuring an electrical parameter, and the third condition that the contact shoes Pa and Pb belonging to the same contact shoe lines La and Lb do not contact to both measurement points P1 and P2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
