| 发明名称 |
POLISHING PAD WITH CONCENTRIC OR APPROXIMATELY CONCENTRIC POLYGON GROOVE PATTERN |
| 摘要 |
Polishing pads with concentric or approximately concentric polygon groove patterns are described. Methods of fabricating polishing pads with concentric or approximately concentric polygon groove patterns are also described. |
| 申请公布号 |
US2012190281(A1) |
申请公布日期 |
2012.07.26 |
| 申请号 |
US201113014630 |
申请日期 |
2011.01.26 |
| 申请人 |
ALLISON WILLIAM C.;SCOTT DIANE;SIMPSON ALEXANDER WILLIAM |
发明人 |
ALLISON WILLIAM C.;SCOTT DIANE;SIMPSON ALEXANDER WILLIAM |
| 分类号 |
B24D11/00;B24D13/14;B24D18/00 |
主分类号 |
B24D11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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