RESISTANCE CHANGE ELEMENT AND MANUFACTURING METHOD THEREFOR

摘要

A resistance change element has a first electrode (107), a second electrode (105), and a resistance change layer (106) provided interposed between the first and second electrodes (107, 105) so as to be in contact with the first and second electrodes (107, 105) and in which a resistance value reversibly changes on the basis of an applied electrical signal. The resistance change layer (106) is constituted by a layered structure of a first resistance change layer (106b) constituted by a first oxygen-deficient metal oxide, and a second resistance change layer (106a) constituted by a second transition metal oxide in which the degree of oxygen deficiency is lower than the degree of oxygen deficiency in the first resistance change layer (106b). The second electrode (105) has just one needle-shaped section at the interface with the second resistance change layer (106a), and the second resistance change layer (106a) is provided between the first resistance change layer (106b) and the second electrode (105) so as to be in contact with the first resistance change layer (106b) and the second electrode (105) and so as to cover the needle-shaped section.