METHOD OF FORMING WIRING AND ELECTRODE USING METAL NANO PASTE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming wiring and an electrode using a metal nano paste.

SOLUTION: A method of forming metal wiring and an electrode includes a sintering process comprising: placing a substrate on which a metal nano paste is printed in a furnace and raising a temperature of the furnace to 220 to 240°C under a nitrogen atmosphere; heating the substrate under a mixed atmosphere of carboxylic acid and air while the temperature of the furnace is maintained in the above temperature range; dropping the temperature of the furnace to 100 to 150°C under the mixed atmosphere of carboxylic acid and air; and dropping the temperature of the furnace to room temperature under a nitrogen atmosphere. Accordingly, even after a low-temperature sintering process, a metal film has a high density and a minimized amount of residual metal particles as is the case in a high-temperature sintering process.

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