PACKAGE TYPE VACUUM PUMP UNIT

摘要

PROBLEM TO BE SOLVED: To provide a package type vacuum pump unit capable of energy saving operation properly by inverter control, even at lower set vacuum pressure.

SOLUTION: The package type vacuum pump unit includes: a vacuum pump 10 having a structure in which a rotor in a cylinder is moved to rotate in a noncontact state by an electric motor 20; an inverter 30 for controlling vacuum output by the vacuum pump 10; a vacuum pressure sensor 40 for measuring output vacuum pressure; a controller 60 for controlling the inverter 30; a housing box 80 in which the vacuum pump 10 and the inverter 30 are housed; and a cooling fan device 90 installed in the housing box 80 to make cooling air flow so as to cool the vacuum pump 10 and the inverter 30.

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