| 摘要 |
<p>Disclosed is an abnormality determination system provided with: an data collecting unit (22) that collects, from a signal output by a sensor placed in a processing device processing a subject to be processed, time-series data (41) fluctuating over time; a data selection unit (23) that selects, from the time-series data collected by the data collecting unit, only model data (43) serving as useful time-series data; a threshold value set unit (25) that calculates, from the model data selected by the data selection unit, up-and-down fluctuation threshold value data (45) fluctuating over time; and a determination unit (26) that determines occurrence of an abnormality by comparing time-series data serving as a subject to be monitored, which is collected by the data collecting unit, with the up-and-down fluctuation threshold value data. The selection of the model data of the data selection unit is performed on the basis of the evaluation result of an inspection device (37) evaluating the processing of the subject to be processed by the processing device after the subject to be processed is processed by the processing device, for example.</p> |
