| 摘要 |
<P>PROBLEM TO BE SOLVED: To significantly improve the accuracy of a MEMS sensor. <P>SOLUTION: A capacitive micromechanical sensor has two fixed electrodes E1, E2 and at least one differential variable capacitor formed by one movable central electrode E0 that can be deflected by an external force. In the deflection measurement of the central electrode E0, a fraction of the force acting on the central electrode E0 corresponding to the electrostatic restorative force is compensated. When a sensor is operated in a closed-loop, a read signal thereof influences a reset-crosstalk signal via a controller PI, so that thus created capacitive restorative force acts against the deflection of the central electrode to compensate the deflection. <P>COPYRIGHT: (C)2012,JPO&INPIT |
