发明名称 |
PLASMA TREATMENT APPARATUS FOR PRODUCING COATINGS |
摘要 |
The invention relates to a device and a method for treating layers using a plasma zone sealed from the outer atmospheric pressure. Said device comprises a plasma reactor having a substrate carrier in the form of a container receiving device and a closing element that is connected to the substrate carrier by means of a lifting device. |
申请公布号 |
CA2824074(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
CA20122824074 |
申请日期 |
2012.01.17 |
申请人 |
SCHOTT AG |
发明人 |
BICKER, MATTHIAS;LOHMEYER, MANFRED;BAUCH, HARTMUT |
分类号 |
H01J37/32;B05D3/14;C23C16/04 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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