发明名称 VISION MEASURING DEVICE
摘要 A vision measuring device includes: an imaging device which images a workpiece; an illumination device which irradiates the workpiece with light; a position control system which controls an in-focus position of the imaging device and outputs the in-focus position as information representing a position in an in-focus axis direction; and a control device which, when the position control system controls the in-focus position, controls the frame rate of the imaging device, and controls at least one of the imaging device and the illumination device such that an amount of light to be received by the imaging device becomes substantially constant.
申请公布号 US2012187275(A1) 申请公布日期 2012.07.26
申请号 US201213350286 申请日期 2012.01.13
申请人 SHIRAI NAOKI;YOSHIDA HIROYUKI;MITUTOYO CORPORATION 发明人 SHIRAI NAOKI;YOSHIDA HIROYUKI
分类号 H01L27/146;G05D3/12 主分类号 H01L27/146
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