摘要 |
A vision measuring device includes: an imaging device which images a workpiece; an illumination device which irradiates the workpiece with light; a position control system which controls an in-focus position of the imaging device and outputs the in-focus position as information representing a position in an in-focus axis direction; and a control device which, when the position control system controls the in-focus position, controls the frame rate of the imaging device, and controls at least one of the imaging device and the illumination device such that an amount of light to be received by the imaging device becomes substantially constant.
|