ROBOT DIAGNOSIS SYSTEM AND ROBOT DIAGNOSIS METHOD USING SAME

摘要

The present invention relates to a robot diagnosis system and to a robot diagnosis method using same. In particular, an operating state of a robot may be monitored in real-time to systematize a process schedule of a wafer and a maintenance and repair plan for the robot. For this purpose, the present invention relates to a diagnosis system for diagnosing the operation of each robot disposed within a chamber of each piece of equipment installed in each bay. The diagnosis system includes: a capture module (30) that collects a command signal, which is a preset reference value, applied to a robot (T) to operate the robot (T) and a feedback signal corresponding to an actual operation of the robot (T) from a driver module (20), which is a controller, so as to transmit the collected signals to the outside; a computation module (40) generating computation data through a preset algorithm with respect to a deviation between the command signal and the feedback signal which are transmitted from the capture module (30) in order to ascertain the operating state of the robot (T); and a screen module (50) displaying the resultant value using numerical values and graphs in real-time on the basis of the computation data.