ION BEAM GENERATION METHOD AND ION BEAM GENERATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To miniaturize an ion beam generation apparatus using a cyclotron.

SOLUTION: A magnetic field strength along a central axis is shown on the right in conjunction with a structure shown on the left. The magnetic field strength is continuously kept at a constant value or higher (nonzero) from a cyclotron 50 to an ECR ion source (ion source) 20. A Wien filter 30 and the ECR ion source 20 each use a coil to utilize a magnetic field where a magnetic field generated by the coil and a magnetic field by the cyclotron are overlapped. Specifically, an ion beam generation method forms a continuously distributed magnetic field along the central axis of a path for an ion beam passing from the ECR ion source 20 to the cyclotron 50. A solenoid coil 41 is used for fine adjustment of the axial magnetic field strength of each component.

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