发明名称 MICROCHANNEL PLATE DETECTOR AND METHODS FOR THEIR FABRICATION
摘要 A multi-component tunable resistive coating and methods of depositing the coating on the surfaces of a microchannel plate (MCP) detector. The resistive coating composed of a plurality of alternating layers of a metal oxide resistive component layer and a conductive component layer composed of at least one of a metal, a metal nitride and a metal sulfide. The coating may further include an emissive layer configured to produce a secondary electron emission in response to a particle interacting with the MCP and a neutron-absorbing layer configured to respond to a neutron interacting with the MCP.
申请公布号 WO2012099658(A2) 申请公布日期 2012.07.26
申请号 WO2011US64593 申请日期 2011.12.13
申请人 UCHICAGO ARGONNE, LLC;ELAM, JEFFREY W.;MANE, ANIL U.;PENG, QING 发明人 ELAM, JEFFREY W.;MANE, ANIL U.;PENG, QING
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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