| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer apparatus which picks up only a work-piece of the top layer, from thin laminated work-pieces, at high speed in a non contact manner. <P>SOLUTION: A transfer apparatus 1 includes: a Bernoulli chuck 12 holding work-pieces 80 in a non-contact manner; a chuck base 10 to which the Bernoulli chuck 12 is attached; a parallel mechanism robot 3 moving the chuck base 10 in the air; and an air nozzle 20 blowing air to an upper layer part of the work-pieces 80 laminated on a cassette 70 from the lateral side. When the chuck base 20 is moved down from above the laminated work-pieces 80 by the parallel mechanism robot 3 and the work-piece 80 of the top layer, out of the laminated work-pieces 80, is picked up by the Bernoulli chuck 12, the air nozzle 20 starts blowing the air before the Bernoulli chuck 12 starts the absorption. <P>COPYRIGHT: (C)2012,JPO&INPIT |
