发明名称 VACUUM TREATMENT APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To enlarge a heat quantity of light emitted from a lamp heater and irradiated to a workpiece. <P>SOLUTION: A reflective film 18 along an axial length is formed on an opposite surface of a surface facing a workpiece W of a lamp heater 15. The reflective film 18 is set to an appropriate angle in a range of an aperture angle &theta;=180-60&deg; of a light and heat opening by alumina or the like being printed or the like on a surface of a tube 16 of a lamp heater 15 in consideration of a size of the workpiece W, a heating temperature or the like. The heat quantity irradiated to the workpiece W increases because reflected light from the reflective film 18 is irradiated to the workpiece W. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012140684(A) 申请公布日期 2012.07.26
申请号 JP20110000324 申请日期 2011.01.05
申请人 SHIMADZU CORP 发明人 NAKAYAMA TSUGUYOSHI
分类号 C23C16/46;H01L21/26 主分类号 C23C16/46
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