发明名称 CROSS SECTION OBSERVATION METHOD
摘要 Provided is a cross section observation method, including the steps of: forming a marker layer at a base material, the marker layer having a conductivity different from that of another portion of the base material; forming a sample, by performing treatment on the base material at which the marker layer is formed; and detecting secondary electrons generated by emitting electrons to a cross section of the sample.
申请公布号 US2012190137(A1) 申请公布日期 2012.07.26
申请号 US201113012585 申请日期 2011.01.24
申请人 ITO SATOMI;MASUDA TAKEYOSHI;SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 ITO SATOMI;MASUDA TAKEYOSHI
分类号 H01L21/66 主分类号 H01L21/66
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