发明名称 |
CROSS SECTION OBSERVATION METHOD |
摘要 |
Provided is a cross section observation method, including the steps of: forming a marker layer at a base material, the marker layer having a conductivity different from that of another portion of the base material; forming a sample, by performing treatment on the base material at which the marker layer is formed; and detecting secondary electrons generated by emitting electrons to a cross section of the sample. |
申请公布号 |
US2012190137(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
US201113012585 |
申请日期 |
2011.01.24 |
申请人 |
ITO SATOMI;MASUDA TAKEYOSHI;SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
ITO SATOMI;MASUDA TAKEYOSHI |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|