发明名称 |
Lithographic Apparatus and Device Manufacturing Method |
摘要 |
A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.
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申请公布号 |
US2012188528(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
US201113335212 |
申请日期 |
2011.12.22 |
申请人 |
BREUKERS MARCUS JOSEPH ELISABETH GODFRIED;HEERTJES MARCEL FRANCOIS;BOSCH NIELS JOHANNES MARIA;ASML NETHERLANDS B.V. |
发明人 |
BREUKERS MARCUS JOSEPH ELISABETH GODFRIED;HEERTJES MARCEL FRANCOIS;BOSCH NIELS JOHANNES MARIA |
分类号 |
G03B27/58 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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