| 摘要 |
[Problem] To improve the conveyance efficiency and throughput of a vacuum conveying system containing a plurality of vacuum conveying mechanisms. [Solution] In this vacuum processing apparatus, four process modules (PM1, PM2, PM3, PM4) and four load-lock modules (LML1, LML2, LMU1, LMU2) are arranged in clusters around a two-stage vacuum conveyance chamber (10). In the apparatus, the entirety of the second stage of the vacuum conveyance chamber (10) is a third vacuum conveyance area (TE3) and the third vacuum conveyance area extends from the second stage to the first stage through an aperture (13) to enter between first and second vacuum conveyance areas (TE1, TE2). A third vacuum conveyance robot (34) has: left- and right-side conveyance units (HR1, HR2), which can move straight in the depth direction (X direction) in the second stage of the third vacuum conveyance area (TE3); and left- and right-side conveyance units (VR1, VR2), which can move straight in the vertical direction (Z direction), i.e. can move up and down, in the aperture (13) of the third vacuum conveyance area (TE3). |
