发明名称 |
CU-GA TARGET AND METHOD FOR MANUFACTURING SAME, AS WELL AS LIGHT-ABSORBING LAYER FORMED FROM CU-GA ALLOY FILM, AND CIGS SOLAR CELL USING LIGHT-ABSORBING LAYER |
摘要 |
A Cu-Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at% and Cu as the balance, wherein the Cu-Ga alloy sintered-compact sputtering target is characterized in that the relative density thereof is 80% or higher, and the compositional deviation of the Ga concentration is within ±0.5 at% of the intended composition. A method for manufacturing a Cu-Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at% and Cu as the balance, wherein the method for manufacturing a Cu-Ga alloy sintered-compact sputtering target is characterized in that Cu and Ga starting materials are melted and cooled/pulverized to manufacture Cu-Ga alloy starting material powder, and the starting material powder is hot-pressed with the retention temperature of the hot press set at a temperature between the melting point of the mixed starting material powder and a temperature 15°C lower than the melting point, and with the pressure applied to the sintered mixed starting material powder set at 400 kgf/cm2 or greater. Provided are a sputtering target having very low compositional deviation and high density, and a method for manufacturing the same, as well as a light-absorbing layer formed from a Cu-Ga alloy film, and a CIGS solar cell using the light-absorbing layer. |
申请公布号 |
WO2012098722(A1) |
申请公布日期 |
2012.07.26 |
申请号 |
WO2011JP68235 |
申请日期 |
2011.08.10 |
申请人 |
JX NIPPON MINING & METALS CORPORATION;TAMURA TOMOYA;YAMAMOTO HIROYOSHI;SAKAMOTO MASARU |
发明人 |
TAMURA TOMOYA;YAMAMOTO HIROYOSHI;SAKAMOTO MASARU |
分类号 |
C23C14/34;B22F3/14;C22C9/00;C22C28/00;H01L31/04 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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