| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a clean room air-conditioning system that is capable of quickly recovering cleanliness of an area where the cleanliness is deteriorated during energy-saving operation without increasing energy consumption uselessly. <P>SOLUTION: The air-conditioning system (1) includes an air volume control part (40) for controlling air volume of each fan (23) when air temperature in the whole area in the clean room is a temperature within the allowable range. The air volume control part (40) includes: an air volume reduction part (40a) for reducing the air volume of the fan (23) of a sensible heat air-conditioner (21) corresponding to a clean area in a prescribed clean state having a small amount of dust; a first rated air volume control part (40b) which controls air volume of the fan (23) of the air-conditioner (21) corresponding to a dust increase area where the amount of dust increases from the clean state and is changed to a predetermined non-clean state to a rated air volume; and a second rated air volume control part (40c) which controls the air volume of the fan (23) of the air-conditioner (21) corresponding to an area adjacent to the dust increase area to the rated air volume instead of the air volume reduction part (40a). <P>COPYRIGHT: (C)2012,JPO&INPIT |
