| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inert gas recovery apparatus which reduces cost in refining argon and can improve the removal rate of carbon monoxide in recovered argon. <P>SOLUTION: The inert gas recovery apparatus comprises: a first removal unit 10 for removing a solid phase component in an inert gas recovered from a pull-up device; an air-introducing unit 20 for introducing air into the inert gas passing through the first removal unit; a second removal unit 30 for removing the solid phase component contained in the inert gas in which air is introduced; a reaction unit 40 for introducing at least hydrogen gas into the inert gas passing through the second removal unit for reaction; a third removal unit 50 for removing moisture in the inert gas passing through the reaction unit; and a fourth removal unit 60 for refining the inert gas passing through the third removal unit to remove the gases of nitrogen, carbon monoxide, carbon dioxide, hydrogen and oxygen. <P>COPYRIGHT: (C)2012,JPO&INPIT |
